Asmlpcvd

低壓化學氣相沉積系統(LPCVDSystem).廠牌：ASM.○主要規格：.1.PolySilicon.Temperature:605℃～620℃.Pressure:0.18～0.25Torr.Uniformity:<5%.,ASMprovidesbatchLPCVD/diffusionprocessesontheverticalfurnaceA400DUOandnovelSonoratools.Historyedit.Seealso:Stepper§History.1960s:In ...,由ETimmermans著作·2002—ThispaperdescribesaninsitucleanprocessfortheASMA400(200mm)andA412(300mm)verticalLPCVDbatchfurnaces.Th...

參考資訊如下
低壓化學氣相沉積系統(LPCVD System) 廠牌：ASM

低壓化學氣相沉積系統 (L P C V D System). 廠牌：ASM. ○主要規格：. 1. Poly Silicon. Temperature: 605℃ ～ 620℃. Pressure : 0.18 ～0.25 Torr. Uniformity : &lt; 5%.

ASM International

ASM provides batch LPCVD/diffusion processes on the vertical furnace A400 DUO and novel Sonora tools. History edit. See also: Stepper § History. 1960s: In ...

In situ cleaning of LPCVD furnaces using a thermal NFsub 3

由 E Timmermans 著作 · 2002 — This paper describes an in situ clean process for the ASM A400 (200 mm) and A412 (300 mm) vertical LPCVD batch furnaces. The clean is based upon a thermal NF/ ...

ASM A400C, Diffusion LPCVD

Brand, ASM. Model, A400. Description, Nitride, x01 Reactor. Serial Number, 2E0127/10. Wafersize, 8. Year of Manufacture. Location, Dresden ...

ASM A400 HT 擴散爐用於銷售價格#9266026, 1998 &gt; 從 ...

LPCVD System Process: Oxide / Poly Dual reactors / Dual boats Boat rotation: Poly (5) Temperature zones 1998 vintage. 閱讀更多關閉. ASM A400 HT（高溫）是 ...

Our technology &amp; products

Vertical furnaces offer very high productivity solutions for a wide range of thermal processes including low pressure chemical vapor deposition (LPCVD), ...

Vertical furnace

LPCVD is a thermal process that deposits various films at low pressure. The CVD processes performed in vertical furnaces at low pressure, with the help of ...

ASM A412 LPCVD For Sale

Configuration: ASM Advance 412 LPCVD system 2 reactor modules, Each can run 200mm and 300mm. Two I/O positions for 25 wafers capacity cassettes.

ASM LPCVD (staff tool) Low-Stress Nitride, Poly | INRF

ASM LPCVD (staff tool) Low-Stress Nitride, Poly · Low Stress · Standard · Substrate Size up to 6”.